AMAT 0010-27983
- Product Name: AMAT 0010-27983 MCA E-CHUCK ESC Heater
- Manufacturer: AMAT (Applied Materials)
- Function: This module is an Electrostatic Chuck (ESC) heater, crucial for controlling wafer temperature in semiconductor processing.
Product Description:
- The AMAT 0010-27983 is a 300mm MCA E-CHUCK ESC Heater designed for use in semiconductor manufacturing equipment.
- It plays a vital role in wafer processing by precisely controlling and maintaining the temperature of the electrostatic chuck (ESC).
- This precise temperature control is essential for ensuring consistent wafer quality during semiconductor manufacturing processes.