AMAT 0010-27983
Alright, here’s the information about the AMAT 0010-27983 module, presented in English:
Product Name:
- AMAT 0010-27983 300MM MCA E-CHUCK ESC Heater
Product Description:
- This module is a heating element designed for use in semiconductor manufacturing equipment.
- It plays a vital role in wafer processing by controlling and maintaining the temperature of the electrostatic chuck (ESC).
- This precise temperature control ensures consistent wafer quality during processing.
- It is specifically designed for 300mm wafer processing equipment.
- It offers precise temperature control, a rapid heating rate, and a long service life.
- It is used in conjunction with an Electrostatic Chuck.
Key Features:
- Provides precise and uniform heating.
- High temperature capability.
- Designed for long service life.
Suitable for semiconductor manufacturing processes.
- Used within 300mm wafer processing equipment.
Product Parameters and Specifications:
Here are some key specifications gathered from the search results:
- Type: 300MM MCA E-CHUCK ESC Heater
- Application: Semiconductor manufacturing
- Wafer Size: Designed for 12-inch (300mm) wafers.
- From information found online, the following can also be stated.
- Dimensions: 135 x 186 x 119 mm.
