AMAT 0190-35712

基于搜索结果,以下是AMAT 0190-35712模块的一些英文信息:

General Information:

  • Manufacturer:
    • AMAT refers to Applied Materials.  
  • Application:
    • This module is used in Applied Materials semiconductor processing equipment.
    • Specifically, it’s related to plasma processing within those machines.
  • Description:
    • The module is described as a “PLASMA CHUCK ASSY.” This indicates it’s an assembly related to the plasma chuck, a critical component in wafer processing.  
    • It is also described as a “THERMOCOUPLE PLASMA CHUCK”, and a “P-CHUCK C-CHUCK P5000 SUSCEPTOR”.
    • Therefore, it relates to the part of the processing equipment that holds the wafer in place during plasma processing, and also includes thermocouple elements for temperature measurement.
  • Key points:
    • It is a component of a Plasma Chuck Assembly.
    • It is used in P5000 CVD processes.
    • It includes thermocouple elements.

Key Points in English:

  • The AMAT 0190-35712 module is a Plasma Chuck Assembly used in Applied Materials semiconductor processing equipment.  
  • It functions as a wafer holding device during plasma processing, and also has temperature monitoring capabilities.
  • It is associated with the P5000 CVD processes.
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