APEX3013 3156114-746

The module is part of a radio frequency (RF) plasma generator produced by Advanced Energy.
Specifically, the APEX3013 is Advanced Energy’s APEX series RF plasma generator.
These generators are used in a variety of process applications, especially in semiconductor manufacturing.
It can also be described as a non-contact voltage gap sensor system.
It is used to measure the static and dynamic distance between a probe tip and an observed object.
Key Features and Specifications (General):

Manufacturer: Advanced Energy

Type: RF Plasma Generator.
Applications:
Semiconductor wafer processing (Etching, PECVD, PVD, Chamber cleaning, HDP-CVD, PEALD, ALE)
Non-contact voltage gap sensing.
Key features:
High power density.
Compact installation.