LAM 719-101612-887

  • This module is a crucial component within semiconductor manufacturing equipment, specifically an Electrostatic Chuck (ESC).
  • The ESC is used during wafer processing to securely hold the wafer in place using electrostatic forces.  
  • This particular ESC is manufactured by Lam Research.
  • ESCs are vital in processes such as semiconductor etching.  
  • This module is very similar to the LAM 719-101612-885 Electrostatic chuck.
  • From online sales sites, that this item is a Electrostatic chuck.

Key Features:

  • Electrostatic Holding:
    • Uses electrostatic forces to secure wafers, ensuring stability during processing.
  • High Precision:
    • Designed for precise wafer positioning and temperature control.
  • Semiconductor Manufacturing Application:
    • Specifically designed for semiconductor etching and related processes.
  • Compatible with Lam Research equipment.

Product Parameters and Specifications:

  • Detailed technical specifications for this module are typically provided by Lam Research directly to their customers, due to the specialized nature of semiconductor manufacturing equipment.
  • Information found indicates this is a electrostatic chuck.
  • To obtain the most accurate and detailed parameters, it is recommended to:
    • Consult the official Lam Research website or product catalogs.
    • Contact Lam Research or their authorized distributors.
  • Typical parameters for ESCs may include wafer size compatibility, electrostatic force, materials, and operating temperature.
  • From information found online, the following can be stated.
    • Brand: LAM RESEARCH
    • Model/Part Number: 719-101612-887
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