LAM 839-101612-887
Product Description:
- This module is a critical component in semiconductor manufacturing equipment, namely an Electrostatic Chuck (ESC).
- An ESC is used during wafer processing to hold the wafer in place using electrostatic force, ensuring it remains securely positioned.
- This particular ESC is manufactured by Lam Research.
ESCs are essential in processes like semiconductor etching.
- It is very similar to the LAM 839-101612-885 Electrostatic chuck.
Key Features:
- Electrostatic Holding:
- Utilizes electrostatic force to secure wafers, ensuring stability during processing.
- High Precision:
- Designed for precise wafer positioning and temperature control.
