MKS RPS AX7695

• Manufacturer: MKS Instruments
• Function: This is a Remote Plasma Source (RPS) module, used in semiconductor wafer processing.

Product Description:

• The MKS RPS AX7695 is an integrated remote plasma source.
• It is designed to provide a clean source of atomic radicals for semiconductor wafer processing.
• It integrates a quartz vacuum chamber, RF power supply, and necessary controls.
• It allows for on-wafer processing and higher flow rates.
• It is a component of the MKS R*evolution® III product line.

Key Features and Specifications:

Based on the search results, here are some key aspects:

• Type: Integrated Remote Plasma Source.
• Ignition Gas Supply: 100% O2 or Ar, or 90% O2/10% N2.
• Process Gas Supply: Up to 6.0 slm of 100% O2, or 90% O2/10% N2.