ABB GFD563A101 3BHE046836R0101

The Advanced Energy APEX3013 is a high performance radio frequency (RF) generator with model number 3156114-746. Such equipment is commonly used in industrial fields such as semiconductor manufacturing and plasma processing. It can produce high-frequency electromagnetic waves to provide the energy required for various processes.

Product parameters and specifications (general parameters, please refer to the official data manual for specific parameters)
Power output: Depending on the model and configuration, the output power may be in the kilowatt class.
Frequency range: Covers a certain frequency range to meet the needs of different processes.
Modulation mode: Support a variety of modulation modes, such as amplitude modulation, frequency modulation, etc.
Phase control: Accurate phase control can be achieved for the synchronization of multiple outputs.

Cooling method: Usually adopts forced air cooling or water cooling method.
Interface: Provide a variety of interfaces, such as digital control interface, analog control interface, etc., easy to connect with other devices.
Protection level: Depending on the application environment, there may be different protection levels.

Main function
Generate high-frequency RF signals: provide energy for plasma ignition, heating, maintenance, etc.
Power regulation: Control the process by adjusting the output power.
Frequency adjustment: By adjusting the output frequency to adapt to different process requirements.
Phase control: synchronization of multiple outputs to improve process accuracy.