AE APEX3013 3156114-746

The Advanced Energy APEX3013 is a high performance radio frequency (RF) generator with model number 3156114-746. Such equipment is commonly used in industrial fields such as semiconductor manufacturing and plasma processing. It can produce high-frequency electromagnetic waves to provide the energy required for various processes.

Cooling method: Usually adopts forced air cooling or water cooling method.

Interface: Provide a variety of interfaces, such as digital control interface, analog control interface, etc., easy to connect with other devices.
Protection level: Depending on the application environment, there may be different protection levels.
Main function
Generate high-frequency RF signals: provide energy for plasma ignition, heating, maintenance, etc.
Power regulation: Control the process by adjusting the output power.

Frequency adjustment: By adjusting the output frequency to adapt to different process requirements.
Phase control: synchronization of multiple outputs to improve process accuracy.
Application field
Semiconductor manufacturing: for wafer processing, thin film deposition and other processes.
Plasma treatment: Used for surface treatment, cleaning, etching, etc.
Material processing: Used for material cutting, welding, melting, etc.
peculiarity
High efficiency: High conversion efficiency, reduce energy loss.
High stability: Good output power and frequency stability.
Programmability: It can be programmed through software to achieve flexible control.
Modular design: easy maintenance and upgrade.