AMAT 0140-09223 Dry vacuum pump

Product details: Country of Origin: USA Moq :1 piece Packaging: new raw materials and individual packaging Delivery time :2-3 working days Payment method: Bank transfer, Western Union We operate ABB, GE aereration, A-B, Honeywell, KUKA, SCHNEIDER, Bentley, TRICONEX Invensys, WOODWARD, FOXBORO, WESTINGHOUSE, and MOTOROLA MOTOROLA, KEBA, KOLLMORGEN, EMERSON, HIMA dark horse, industrial and commercial energy storage, container energy storage, household light energy storage, (peak cutting, valley filling, backup power supply) can be contacted if necessary. Contact: Han Fangting Sales Manager Mobile :18030042035 QQ: 748141623 Email: 748141623@qq.com Web site :www.changxindcs.com www.changxinsz.com

AMAT 0140-09223

AMAT 0140-09223 module is a dry vacuum pump for semiconductor manufacturing equipment, which can provide high vacuum degree and high pump rate to meet the requirements of semiconductor manufacturing process. It has the following characteristics:

High vacuum degree: the limit vacuum degree can reach 10^-9 Torr, which meets the requirements of the semiconductor manufacturing process.
High pumping rate: The pumping rate can reach 100 CFM, which can quickly remove the gas in the chamber.
Low noise: Low noise, comfortable working environment.
Low vibration: small vibration, stable operation.
Easy maintenance: Easy to maintain, easy to replace consumables.
Product parameter


Parameter value
Limiting vacuum 10^-9 Torr
Pumping rate 100 CFM
Rated power 2 kW
Power supply voltage 380V AC
Dimensions 1000 mm x 600 mm x 400 mm

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