AMAT 0140-09223
AMAT 0140-09223 module is a dry vacuum pump for semiconductor manufacturing equipment, which can provide high vacuum degree and high pump rate to meet the requirements of semiconductor manufacturing process. It has the following characteristics:
High vacuum degree: the limit vacuum degree can reach 10^-9 Torr, which meets the requirements of the semiconductor manufacturing process.
High pumping rate: The pumping rate can reach 100 CFM, which can quickly remove the gas in the chamber.
Low noise: Low noise, comfortable working environment.
Low vibration: small vibration, stable operation.
Easy maintenance: Easy to maintain, easy to replace consumables.
Product parameter
Parameter value
Limiting vacuum 10^-9 Torr
Pumping rate 100 CFM
Rated power 2 kW
Power supply voltage 380V AC
Dimensions 1000 mm x 600 mm x 400 mm
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