KLA KLA 5105
The KLA 5105 module is part of the KLA 5105 photomask defect detection system. The system is used to detect defects on the mask plate that can lead to defects in the chip manufacturing process. The KLA 5105 module is responsible for controlling the system’s laser scanner and image processing system.
The module has the following features:
High precision defect detection
High throughput
Easy to use
Product parameters:
Power supply voltage: 24 VDC
Power consumption: < 100 W
Operating temperature: 10°C to +35°C
Relative humidity: 5% to 85% (non-condensing)
Protection class: IP65
Specifications:
Module size: 600 mm x 400 mm x 200 mm
Weight: 50 kg
Connectors: Various industrial connectors
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