LAM 810-102361-222 Control chamber interior multiplexer

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LAM 810-102361-222

The LAM 810-102361-222 module is a key component in a semiconductor manufacturing device manufactured by LAM Research. Based on the available information, it is most likely a circuit board used to control the intracavity multiplexer.

Product name

LAM Research chamber multiplexer circuit boards
810-102361-222 Control module
Product description
The module plays an important role in the semiconductor manufacturing process, especially in processes such as plasma etching. It realizes the fine processing of semiconductor materials by controlling multiple channels to switch different gases, power supplies or other parameters.

Speculative function

Multiplexing: Control multiple channels to achieve switching of signals or power.
Signal processing: Processing signals from sensors or controllers.
Interface control: Communicate with other devices to achieve system integration.