MKS RPS AX7695

The MKS RPS AX7695 module is a powerful, highly reliable gauge controller module designed for MKS Instruments, Inc. The vacuum gauge system is designed. It can be used to control vacuum pumps, valves, sensors and other equipment to achieve automatic control of vacuum systems, suitable for a variety of industrial applications, including:

Semiconductor manufacturing: For example, controlling the pressure of a vacuum chamber during semiconductor manufacturing
Thin film deposition: For example, controlling the pressure in the vacuum chamber during thin film deposition
Analytical instruments: For example, control of vacuum system pressure in analytical instruments

Scientific experiments: For example, control of vacuum system pressure in scientific experiments
The module has the following features:

High accuracy: Provides precise pressure measurement and control
Fast response: Provides fast response time and control speed
Easy to use: Provides an intuitive programming language and graphical interface that is easy to configure and maintain
Scalability: Can be used with other MKS RPS series modules to build flexible vacuum control systems
Product parameters:

Model: RPS AX7695
Type: Vacuum gauge controller module
Pressure range: 10-13 to 1000 Torr
Accuracy: ± 2% full scale
Response time: < 1 s
Control interface: RS-232, RS-485, analog
Operating temperature: 0°C to +50°C
Protection class: IP65