MKS RPS AX7695
The product name of the MKS RPS AX7695 module is “MKS RPS AX7695 Remote Plasma Source” . The product is a remote plasma source with a wide range of applications may work in conjunction with other industrial equipment for automated control and management. Its modular and block design features support for in-cabinet (IP20) and enhanced on-site installation (IP67/69K) options, to suit different installation environments.
Product specifications include: frequency 13.56MHz, power 2 kW, plasma density greater than 10^12 cm^-3, plasma uniformity less than 5%. its dimensions are 600 mm x 400 mm x 300 mm and weighs 20 kg. The product is widely used in water supply, building infrastructure, data center,
renewable energy, mechanical automation, material processing, ocean and other fields
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