Expansion module
The MKS 122AA-00010AB-S module is a piezoresistive pressure sensor module for measuring vacuum and low pressure. It has the following characteristics:
High precision
High stability
wide-range
Reliable and durable
The 122AA-00010AB-S module is suitable for the following applications:
Semiconductor manufacturing
Thin film deposition
Optical coating
Laboratory study
other
Product parameters:
Range: 0-1000 Torr
Accuracy: ±0.5% full scale
Resolution: 0.1 Torr
Temperature range: 0°C to 80°C
Pressure overload: 2 times full scale
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