NOVELLUS 02-00374-00

Novellus 02-00374-00 is a dedicated module for semiconductor manufacturing equipment manufactured by Novellus Systems (now acquired by KLA-Tencor). Due to the high degree of modularity of semiconductor manufacturing equipment, and the specific functions and specifications of each module are often customized according to the device model and customer needs, more detailed information is required to obtain the precise product name, description, parameters and specifications of the module.

Possible product type and function speculation
Based on the model “02-00374-00”, we can make some guesses:

02: May represent product series or year of production.
00374-00: May represent the specific model or version of the module.
In combination with Novellus’ main product line in semiconductor manufacturing equipment, we can speculate that the module may fall into the following categories:

PECVD (Plasma Enhanced Chemical Vapor Deposition) device modules: Modules for deposition of thin films, which may include RF generators, gas control modules, temperature control modules, etc.
CVD (Chemical Vapor Deposition) device module: A module for deposition of thin films, similar in function to the PECVD module.
ALD (Atomic Layer Deposition) device module: A module for depositing films of atomic thickness.
Etching equipment module: A module used to remove unwanted material.
CMP (Chemical Mechanical Polishing) device module: A module for leveling the surface of a wafer.