PFEIFFER EVR116
The Pfeiffer EVR 116 is a precision gas control valve module for controlling gas flow. It is driven by a stepper motor, which provides high precision and reliable flow control. The module has the following features:
High precision flow control
Wide flow control range
Fast response time
Programmable control
Comply with IECEx explosion-proof standard
The EVR 116 module is suitable for a variety of industrial applications, including:
Vacuum system
Analytical instrument
Gas delivery system
Leak detection system
Sputtering coating
Product parameters:
Parameter value
Flow range 0.005 to 50 slm
Accuracy ± 1% full scale
Response time < 100 ms
Control interface analog, digital
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